| About this Abstract |
| Meeting |
MS&T21: Materials Science & Technology
|
| Symposium
|
2021 Undergraduate Student Poster Contest
|
| Presentation Title |
Pressure Optimization of Fast-Moving Silicon MEMS Micromirrors |
| Author(s) |
Adam Eichhorn, Andrew Oliver |
| On-Site Speaker (Planned) |
Adam Eichhorn |
| Abstract Scope |
In a solid-state Lidar system, microelectromechanical systems (MEMS) micromirrors must operate with stability and speed. Under atmospheric pressure, the behavior of air damping in the micron-scale gap beneath the mirror significantly limits angular deflection. To optimize this deflection, a variety of ambient pressures were tested during high-frequency micromirror operation to identify the ideal packaging pressure. |