| About this Abstract |
| Meeting |
2025 TMS Annual Meeting & Exhibition
|
| Symposium
|
Mechanical Behavior Related to Interface Physics IV
|
| Presentation Title |
Mechanical behavior of epitaxial thin film exfoliation |
| Author(s) |
Corinne E. Packard, Anna Braun |
| On-Site Speaker (Planned) |
Corinne E. Packard |
| Abstract Scope |
Removing epitaxially grown thin film devices from their substrates is enabling device performance improvements in extreme environments, flexible geometry for novel sensing applications, and substrate reuse for cost reduction or improved materials utilization. Mechanical exfoliation offers an alternate solution to chemical lift-off and implantation-based techniques, which have notable materials selectivity issues and can cause defects that impair wafer reuse. Mechanical exfoliation techniques involve fracture along an interface or within the bulk of the material, usually with the assistance of some biaxial tension pre-stressing and an external force to initiate and propagate the fracture. Competition between minimization of fracture surface area and surface or interfacial energies controls the morphology of the fracture surface. This talk will discuss how anisotropic surface energies of single crystal wafers prescribe faceted fracture surface morphology and show how introducing subsurface nanopatterning can be used to circumvent faceting in gallium arsenide. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Mechanical Properties, Thin Films and Interfaces, Sustainability |