| About this Abstract |
| Meeting |
2024 TMS Annual Meeting & Exhibition
|
| Symposium
|
Characterization of Minerals, Metals and Materials 2024: Process-Structure-Property Relations and New Technologies
|
| Presentation Title |
Correlative Cutting Techniques for Rapid Microcantilever Beam Preparation and Notch Analysis |
| Author(s) |
Md Tariqul Islam, Christopher Weinberger, Gregory B Thompson |
| On-Site Speaker (Planned) |
Md Tariqul Islam |
| Abstract Scope |
Focused Ion Beam (FIB) or Plasma FIB (PFIB) procedures have enabled the ability to make samples capable of conducting mechanical tests at the microscale regime. Nevertheless, milling times and shape optimization can be arduous, limiting the ability to make a sufficient number of samples. We report a sample preparation technique for microscale cantilever fabrication which simplifies the milling procedures through the use of correlated electropolishing and FIB milling steps. Specifically, the procedure mitigates extensive undercutting requirements. As part of our FIB milling, we also evaluated the notch fabrication, quantifying a parabolic depth profile from the exterior surfaces to the internal regions within the cantilever. Through local proximity of the cantilever to the ‘bulk’ sidewalls, we demonstrate a means to eliminate this parabolic profile to ensure a constant (invariant) depth value through the width of the cantilever that is required for accurate fracture toughness testing and the reporting of such values. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Characterization, Mechanical Properties, Other |