| About this Abstract |
| Meeting |
2025 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advances and Discoveries in Non-equilibrium Driven Nanomaterials and Thin Films
|
| Presentation Title |
Process dependent work function of carbide forming refractory metals |
| Author(s) |
Stephen J. McDonnell, Adrian Kam, Daniel Stokes, Alyana A Carrell, Ariana A Guzman, Michael N Groves |
| On-Site Speaker (Planned) |
Stephen J. McDonnell |
| Abstract Scope |
Carbide forming refractory metals are important for low contact resistance contacts to diamond substrates. While Ti has been the common metal of choice, recent studies showing improved high-temperature stability of other refractory metal contacts on boron doped diamond substrates has broadened consider to other metals. In this work we consider the work function of a selection of refractory metals. These values have been well established in the literature for pure metals and a number of fundamental studies consider the change in work function with adsorbed oxygen on pure metals, however contact metal depositions are typically carried out in high vacuum rather than ultra-high vacuum. As such, the metals typically contain detectable levels of oxygen within the film. Here we study the work function of the metals as a function of oxygen using ultra-high vacuum conditions with controlled O2 partial pressures during deposition. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Electronic Materials, Thin Films and Interfaces, Characterization |