| About this Abstract |
| Meeting |
2023 Annual International Solid Freeform Fabrication Symposium (SFF Symp 2023)
|
| Symposium
|
2023 Annual International Solid Freeform Fabrication Symposium (SFF Symp 2023)
|
| Presentation Title |
Development of Joint Manufacturing and In-line Metrology System for the Patterning of 3D Holographic Structures in Roll-to-roll Processes |
| Author(s) |
Barbara Groh, Cody Lee |
| On-Site Speaker (Planned) |
Barbara Groh |
| Abstract Scope |
Roll-to-roll (R2R) fabrication at the micro and nano scales promises to increase manufacturing throughput and reduce unit cost while providing avenues for unique product applications. By exploring the potential of creating 3D structures with a single pattern and being able to confirm pattern success in-situ, existing overlay error can be mitigated. This paper demonstrates steps being taken to combine a R2R 3D nanolithography tool and an AFM-based in-line metrology tool into a functional system for patterning precise 3D structures. The existing manufacturing system will be adapted to pattern complex structures with a flexible PDMS mask currently being proven on stationary substrates. Modifications to the AFM system will include a focus on imaging patterns with varying mechanical properties and tailoring the system to include gathering mechanical information as well as imaging. By mapping surface features, the AFM tool will identify surface imperfections and predict failures occurring within the 3D structure. |
| Proceedings Inclusion? |
Definite: Post-meeting proceedings |