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Meeting 2025 TMS Annual Meeting & Exhibition
Symposium Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XXIV
Presentation Title Microstructures of Ag-In transient liquid phase bonding using In-coated Ag sheet
Author(s) Xunda Liu, Hiroaki Tatsumi, Zhi Jin, Hiroshi Nishikawa
On-Site Speaker (Planned) Hiroshi Nishikawa
Abstract Scope The third generation semiconductors, such as SiC and GaN, are being developed as promising replacements for Si-based semiconductors. To use these semiconductors, the high-temperature bonding process is one of the key technologies. Recently, transient liquid phase (TLP) bonding has been regarded as one of possible solutions for such high temperature process. In this study, a feasibility study has been conducted to determine whether Ag-In sandwich sheet can be used for bonding two Ag-plated Cu disks. The shear strength of the sample bonded at 225 ℃ for was evaluated. It was found that after 5 min bonding, the upper disk bonded well with the lower disk, with a shear strength around 15 MPa. This strength increased to around 20 and 30 MPa after 10 and 30 min bonding. It could be concluded that the Ag plated Cu disk was successfully bonded by Ag-In sandwich structure with significantly shortened bonding time.
Proceedings Inclusion? Planned:
Keywords Electronic Materials, Process Technology,

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