| About this Abstract |
| Meeting |
2022 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advanced Functional and Structural Thin Films and Coatings
|
| Presentation Title |
Fifty Shades of TiN: How Deposition Conditions Influence the Growth Morphology and Thereby Hardness and Especially Fracture Toughness |
| Author(s) |
Paul H. Mayrhofer, Rainer Hahn, Alexander Kirnbauer |
| On-Site Speaker (Planned) |
Paul H. Mayrhofer |
| Abstract Scope |
Almost fifty different TiN coatings were prepared by reactive and unreactive magnetron sputtering, as well as by reactive cathodic arc evaporation. In addition to vary between these three individual deposition techniques, we also individually varied the substrate temperature, partial pressures, substrates (e.g., single-phase MgO, to allow for epitaxial growth or not), as well as bias potential. The fracture toughness of these individually prepared TiN coatings was evaluated from micromechanical bending tests (inside a FEGSEM) of free-standing cantilevers. The individual deposition techniques and conditions result in either pronounced columnar or rather dense growth morphologies, with open or compact column and grain boundary regions. Due to these variations in growth morphology the hardness (obtained by nanoindentation with the Oliver–Pharr method) of TiN varied between 15.9 and 39.7 GPa and their fracture toughness between 0.6 and 2.9 MPa√m. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Thin Films and Interfaces, Characterization, Other |