| Abstract Scope |
Invar (64Fe-36Ni) has been used as the material of fine metal mask (FMM), key component in the OLED displays, due to its low coefficient of thermal expansion. As the resolution of OLED is increased, thickness of FMM is reduced, however the conventional rolled invar film was reached to its thickness limit. Electroplating is considered as one of the alternative techniques to fabricate high resolution FMM. However, the electroplated invar has less compositional homogeneity compared to rolled invar. Galvanostatic electroplating was applied to obtain invar alloy. Conventional electroplating parameters, such as current density and bath composition were varied and optimized. The other parameters, cathode, anode, and mass flow rate, also affected on the composition of deposits and then the effects of those parameters were also investigated. The electrochemical monitoring and analysis were conducted to verify the effects of plating parameters on the anomalous behavior of Fe-Ni electroplating. |