| About this Abstract |
| Meeting |
2025 TMS Annual Meeting & Exhibition
|
| Symposium
|
Characterization of Materials through High Resolution Coherent Imaging
|
| Presentation Title |
Three-Dimensional Hard X-Ray Ptychographic Reflectometry Imaging on Extended Mesoscopic Surface Structures |
| Author(s) |
Peco Myint, Ashish Tripathi, Jin Wang, Miaoqi Chu, Zhang Jiang |
| On-Site Speaker (Planned) |
Peco Myint |
| Abstract Scope |
Nano and quantum devices, ranging from millimeters to sub-nanometer scales, feature complex low-dimensional, non-uniform, or hierarchical surface and interface structures crucial to their functionality. Accurate characterization of these structures is essential for understanding their function-structure relationship. We developed the technique of hard X-ray ptychographic reflectometry imaging, which combines high-resolution two-dimensional imaging of extended objects using hard X-ray ptychography with depth profiling capabilities of X-ray reflectivity for layered surface structures. This approach synergistically utilizes reconstructed amplitude and phase information to reveal surface topography, localized structures like shapes and electron densities, and statistical details such as interfacial roughness. Particularly suitable for mesoscopic samples with planar or layered nanostructures on opaque supports, it can offer high-resolution surface metrology and defect analysis for semiconductor devices, including integrated nanocircuits and lithographic photomasks used in microchip fabrication. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Characterization, Thin Films and Interfaces, Modeling and Simulation |