About this Abstract |
Meeting |
MS&T24: Materials Science & Technology
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Symposium
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Solid-State Transformations Under Complex Thermal Conditions
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Presentation Title |
Design and Function of a Nanocalorimetry Sensor for In-Situ TEM Imaging |
Author(s) |
Lakshmi Ravi Narayan, William Alexander Osborn, Feng Yi |
On-Site Speaker (Planned) |
Lakshmi Ravi Narayan |
Abstract Scope |
In this work, a technique that combines nanocalorimetry with in-situ TEM imaging is presented. Nanocalorimetry utilizes chip-based sensors to perform thermal analysis at rapid rates, allowing for the characterization of far-from-equilibrium processes. For in-situ experiments, the 100 nm thick silicon nitride membrane on which the heating and temperature measurement circuitry is present is further thinned inside 5 µm by 5 µm windows to allow for electron transparency. Through these windows, the sample can be imaged during heating or cooling ramps in a TEM equipped with a high-speed camera. This combination allows for observations of the microstructural evolution to be directly linked to the thermal analysis. We demonstrate the use of this technique on microelectronic device materials but this technique is valuable to a wide range of materials and systems including those that are reactive, toxic, and radioactive due to the very small sample masses used, often 1 – 10 ng. |