About this Abstract |
Meeting |
2024 TMS Annual Meeting & Exhibition
|
Symposium
|
Functional Nanomaterials 2024
|
Presentation Title |
Dynamic Chemical Vapor Deposition for Controlling Geometric Uniformity of Macroscopic Carbon Nanotube Forests |
Author(s) |
Golnaz Najaf Tomaraei, Moataz Abdulhafez, Soumalya Ghosh, Jaegeun Lee, Mostafa Bedewy |
On-Site Speaker (Planned) |
Mostafa Bedewy |
Abstract Scope |
To realize the true potential of vertically aligned carbon nanotubes (VACNTs), known as CNT forests, for directional mass and energy transport applications, it is critical to develop robust fabrication processes. Our custom-designed chemical vapor deposition (CVD) reactor with an infrared heating multizone furnace capable of rapid thermal processing allows the programming of highly dynamic recipes. In this work, we present an approach for controlling geometric uniformity of CNT forests based on the combined effects of substrate holder design and dynamicity of temperature. We propose a mechanism that explains the origins of such nonuniformities based on both the temperature profile across the catalyst chip, which depends on the substrate holder design, and the temperature range for CNT growth. A comparative study of the multilayer catalyst after annealing with two different substrate holder designs show that the spatial distribution of temperature depends on the substrate holder, which supports our proposed mechanism. |
Proceedings Inclusion? |
Planned: |
Keywords |
Nanotechnology, Thin Films and Interfaces, Electronic Materials |