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About this Abstract
Meeting	2025 TMS Annual Meeting & Exhibition
Symposium	Characterization of Materials through High Resolution Coherent Imaging
Presentation Title	High-Resolution X-Ray Imaging of Integrated Circuits
Author(s)	Tomas Aidukas, Nicholas W. Phillips, Ana Diaz, Emiliya Poghosyan, Elizabeth Muller, A. F. J. Levi, Gabriel Aeppli, Manuel Guizar-Sicairos, Mirko Holler
On-Site Speaker (Planned)	Tomas Aidukas
Abstract Scope	Integrated circuit inspection is particularly challenging due to the need for extremely high-resolution imaging and high throughput over large sample areas. As nanostructure dimensions decrease, meeting these resolution demands becomes increasingly difficult. Ptychographic X-ray tomography, a non-destructive coherent diffractive imaging technique, offers a solution by enabling the acquisition of high-resolution 3D maps of various samples. In this talk, I will discuss the challenges and innovative solutions required for high-resolution 3D X-ray imaging, with a focus on integrated circuits. I will present X-ray imaging methods used for 3D imaging of integrated circuits and demonstrate the latest results, achieving a resolution of 4 nm, sufficient to resolve the transistor layer of a 7-nm node integrated circuit. Achieving such high-resolution imaging highlights the potential of X-ray nano-tomography for high-throughput integrated circuit inspection, paving the way for advancements in materials characterization and electronic device analysis.
Proceedings Inclusion?	Planned:
Keywords	Characterization, Nanotechnology, Other

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Simultaneous Reciprocal and Real Space X-Ray Imaging for Hierarchical Characterization of 3D Nano-Architected Metamaterials

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