| About this Abstract |
| Meeting |
2025 TMS Annual Meeting & Exhibition
|
| Symposium
|
Phase Stability, Phase Transformations, and Reactive Phase Formation in Electronic Materials XXIV
|
| Presentation Title |
Tuning topotactic transformations in vanadium oxide thin films for microbolometer applications |
| Author(s) |
Ujjwal Chitnis, Shailendra Kumar, Sonika Singh, Jay Krishna Anand, Ram Krishna Ghosh, Ankur Goswami |
| On-Site Speaker (Planned) |
Ujjwal Chitnis |
| Abstract Scope |
Vanadium oxides fall into the category of strongly correlated system and form stable oxides, notably V2O3, VO2, and V2O5. The transformation between phases can be controlled by modulating the topotactic reactions, which involves adding or removing oxygen. This procedure results in the development of mixed phase vanadium oxide (VOx), which is utilised for uncooled microbolometers. This study focuses on optimising and enhancing the development of mixed phase VOx by DC reactive sputtering. The primary goal is to achieve high TCR, high film crystallinity, have low defects and low flicker (1/f) noise. We have studied the effect of gas flow rate, deposition pressure, DC power and deposition time in relation to the structure property correlations. Our observation indicates that the gas flow rate has a substantial impact on the chemical composition, microstructure of the film, and electrical characteristics of the device. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Electronic Materials, Phase Transformations, Thin Films and Interfaces |