About this Abstract |
| Meeting |
2021 TMS Annual Meeting & Exhibition
|
| Symposium
|
Characterization of Materials through High Resolution Imaging
|
| Presentation Title |
Near-surface Optical Characterisation of Ion Implantation in Titanium Oxide Thin Films |
| Author(s) |
Eugeniu Balaur, Brian Abbey |
| On-Site Speaker (Planned) |
Brian Abbey |
| Abstract Scope |
Monitoring the dielectric properties of thin films is critical for both electronic applications and integrated circuit production but is often difficult to achieve using conventional imaging techniques. Here we present a new approach using optical coherent diffraction to characterise ion implantation in ultra-thin layers of titanium oxide. Analysis of the data enables us to characterise the doped regions in the films based on their near-surface optical contrast. Using Monte Carlo simulations and the Maxwell-Garnett relation, we are able to quantitatively interpret the observed results in terms of the ion implantation dose. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Nanotechnology, Thin Films and Interfaces, Surface Modification and Coatings |