Conference Tools for 2021 TMS Annual Meeting & Exhibition

Help

About this Abstract
Meeting	2021 TMS Annual Meeting & Exhibition
Symposium	Characterization of Materials through High Resolution Imaging
Presentation Title	Near-surface Optical Characterisation of Ion Implantation in Titanium Oxide Thin Films
Author(s)	Eugeniu Balaur, Brian Abbey
On-Site Speaker (Planned)	Brian Abbey
Abstract Scope	Monitoring the dielectric properties of thin films is critical for both electronic applications and integrated circuit production but is often difficult to achieve using conventional imaging techniques. Here we present a new approach using optical coherent diffraction to characterise ion implantation in ultra-thin layers of titanium oxide. Analysis of the data enables us to characterise the doped regions in the films based on their near-surface optical contrast. Using Monte Carlo simulations and the Maxwell-Garnett relation, we are able to quantitatively interpret the observed results in terms of the ion implantation dose.
Proceedings Inclusion?	Planned:
Keywords	Nanotechnology, Thin Films and Interfaces, Surface Modification and Coatings

OTHER PAPERS PLANNED FOR THIS SYMPOSIUM

Adaptive Machine Learning for 3D Bragg Coherent Diffraction Imaging Reconstructions

Confocal Bragg Ptychography for 3D Mapping of Bulk Specimens

Evaluation of TATB Crystal Morphology for Predicting Sensitivity Using X-ray Computed Tomography

Exploiting Machine Learning Techniques in X-ray Ptychography

High Speed, High Resolution, High Temperature 3D Imaging of Spacecraft Materials during Atmospheric Entry Conditions

ID01 in Light of the ESRF-EBS

Image-based Simulation of Permeability and Image-to-Mesh Conversion of X-ray Tomographic Images of a Nickel Foam

Imaging Materials on the Run: Shedding Light on Fast Structural Processes Using Time-resolved Synchrotron X-ray Tomographic Microscopy

Imaging Phase Transitions of Quantum Materials with Bragg Coherent X-ray Diffraction

Improve Phase Retrieval Performance in Bragg CDI by Simultaneous Reconstruction of Multiple Diffraction Peaks

In Situ and Operando 3D Nano-imaging for Materials Science at the ESRF

Indexing Grains: A Comparison between Three-dimensional Synchrotron X-ray Diffraction and Electron Backscatter Diffraction Techniques

Investigating the Early Life on Earth with Nanoscale X-ray Coherent Imaging

Laboratory and Synchrotron-based X-ray Tomographic Imaging during In Situ Loading of Materials

Magnetic Correlations and Time Fluctuations in Assemblies of Fe3O4 Nanoparticles Probed via X-rays

Megahertz X-ray Microscopy for Imaging High-speed Phenomena in Opaque Materials

Mesoscale Defect Dynamics in the Bulk with Time-resolved Dark-field X-ray Microscopy

Microstructural Characterization and Mechanical Behavior of a Meteorite Using Correlative Microscopy

Multi-peak Phase Retrieval for Coherent X-ray Diffraction Imaging at High Energies

Near-surface Optical Characterisation of Ion Implantation in Titanium Oxide Thin Films

Optimization Based Approach for 3D Alignment in X-ray Nano-tomography

Ptychographic Inversion with Deep Learning Network and Automatic Differentiation

Quantitative Data Analysis of Dynamic Tomography Data with Motion Artifacts

Retrieving the Full 3D Strain Tensor for Nanoscale Materials Science Applications at 34-ID-C

Study of Structure of Beam-sensitive Supported Nanoparticle Catalysts by Low-dose High Resolution Phase Contrast Imaging

The Fourth is Strong in These Ones!

Using Phase Field Simulations to Train Convolutional Neural Networks for Segmentation of Experimental Materials Imaging Datasets

Using the Rotation Vector Base Line Electron Back Scatter Diffraction (RVB-EBSD) Method to Characterize Single Crystal Cast Microstructures

X-ray Based Nanodiffraction to Study Strain in Materials for Nuclear Energy

X-ray Imaging of Three-dimensional Magnetic Systems and Their Dynamics

Questions about ProgramMaster? Contact programming@programmaster.org