| About this Abstract |
| Meeting |
2021 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advanced Functional and Structural Thin Films and Coatings
|
| Presentation Title |
Highly Doped Si Metasurfaces Obtained by Coupling Top Down and Out of Equilibrium Approaches |
| Author(s) |
Jean-Marie Poumirol, Clément Majorel, Nicolas Chery, Meiling Zhang, Christian Girard, Nicolas Mallet, Filadelfo Cristiano, Peter Wiecha, Guilhem Larrieu, Sébastien Kerdiles, Anne-Sophie Royet, Pablo Acosta, Vincent Paillard, Caroline Bonafos |
| On-Site Speaker (Planned) |
Caroline Bonafos |
| Abstract Scope |
The appearance of LSPR in highly doped Si nanostructures opens a new field of applications, with Si-based plasmonic tunable over a wide infrared range.
We propose a new approach consisting at optimizing the doping of thin silicon layers, by means of Laser Thermal Annealing, in which nanometer size disks are produced by low energy electron beam lithography. Hence, dense hexagonal arrays of 50 nm sized nanodisks have been obtained on phosphorus doped SOI wafers. Recrystallisation processes and P redistribution during LTA have been investigated by HREM and STEM-EDX. Active dopant concentration in the bulk SOI as high as 4 at. % have been deduced from Hall effect and FTIR measurements. Finally, intense and tunable (blueshift with the P content) far-IR LSPR have been observed in FTIR on the doped nanodisks metasurfaces in good agreement with Green Dyadic method predictions, revealing subtle effects linked to the underlying substrate and structuration. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Nanotechnology, Thin Films and Interfaces, |