| Abstract Scope |
FIB-SIMS is an emerging technique that has been gaining attention in recent years. This is due to its ability to analyze light elements, isotopic compositions, its ability to directly correlate SIMS datasets with results from other analytical techniques in FIB, and a significant cost reduction relative to standalone SIMS instruments. The major limitation of traditional FIB-SIMS, however, comes from the primary ion beam in the standard FIB instrument, which is normally Ga or Xe. Both primary ions give lower secondary ion yields relative to O2+ or Ce+, which are commonly used in standalone SIMS instruments. Here we show that by incorporating a TOF-SIMS detector onto a Thermo Helios Hydra PFIB, which has O2+ available as a primary beam, the sensitivity of the instrument is increased, and thus the utility expanded. We will present studies of secondary ion yields and characterization of various materials demonstrating enhanced utility of this one-of-a-kind instrument. |