| Abstract Scope |
Combinatorial thin film sputtering can be leveraged to rapidly explore multiple-principal element alloys for mechanical alloy design and we will overview our recent work on the TawTixHfyZrz, system. The crystal structure, phase fraction, film morphology, mechanical, and thermal properties are all correlated to the TawTixHfyZrz composition in the as-deposited and annealed state. XRD shows that the film is BCC at high Ta compositions and shifts to HCP with decreasing Ta, and temperature dependent XRD shows the equiatomic composition transitions from BCC-to-HCP at high temperature and the cooling rate controls the BCC/HCP ratio. Nanoindentation on the as-deposited and annealed films reveals significant strengthening in the annealed nanogranular films, and we attribute “wobbles” in the observed load, hardness, modulus versus depth to transformation induced plasticity, which is confirmed via transmission electron microscopy. Finally, we overview the applicability of the process for multi-principle element oxides, carbides, nitrides and borides via reactive sputtering. |