| About this Abstract |
| Meeting |
2025 TMS Annual Meeting & Exhibition
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| Symposium
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Atomistic Simulations Linked to Experiments to Understand Mechanical Behavior: A MPMD Symposium in Honor of Professor Diana Farkas
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| Presentation Title |
Solid State Dewetting of Co-Sputtered Thin Mo-Cu Films Accompanied by Phase Separation |
| Author(s) |
Feitao Li, Afnan Mostafa, Niaz Abdolrahim, Jonathan Zimmerman, Zhao Liang, Leonid Klinger, Jeyun Yeom, Jolanta Janczak-Rusch, Eugen Rabkin |
| On-Site Speaker (Planned) |
Eugen Rabkin |
| Abstract Scope |
We have fabricated 20 nm-thick Mo-Cu films deposited on basal-plane oriented sapphire substrates employing magnetron co-sputtering method. At the final dewetting stages two types of structures were formed: isolated, closely spaced Mo nanoparticles, and large Cu particles decorated with much smaller Mo nanoparticles. The post-annealing selective etching of Cu with hydrochloric acid and selective evaporation of Cu during annealing at 1000 ℃ have exposed Mo nanoparticles beneath large Cu particles. The morphology of these Mo nanoparticles indicated that they are dragged by receding surface of evaporating/equilibrating Cu particles. We formulated a semi-quantitative kinetic model describing this drag in terms of surface and interface self-diffusion of Mo. The driving force for particle drag was estimated employing a combination of transmission electron microscopy and atomistic molecular dynamics simulations. Our results shed new light on the solid state dewetting in the binary immiscible thin films with vastly different diffusivities of the components. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Thin Films and Interfaces, Modeling and Simulation, Phase Transformations |