| About this Abstract |
| Meeting |
2024 TMS Annual Meeting & Exhibition
|
| Symposium
|
Aluminum Alloys: Development and Manufacturing
|
| Presentation Title |
Fabricate Sputter Targets and Evaluate Sputter Characteristics Using High-purity Al Refined Material
|
| Author(s) |
Sun Ki Kim, Seong-Ho Ha, Young-Kyun Kim, Jin-Kyu Lee |
| On-Site Speaker (Planned) |
Sun Ki Kim |
| Abstract Scope |
As the display industry has become larger and expanded in industrial range, sputtering processes using high-purity metals have been widely applied, and among them, sputtering processes using high-purity Al materials, which are lightweight materials, have been established in the industry. In this study, a 10-inch continuous casting billet was manufactured by vacuum continuous casting process using high-purity Al material fabricated by the electro-refining process. After evaluating the purity of the refined material and the vacuum continuous casting billet, it was found to have a high purity of more than 5N, and hot extrusion was performed to produce a plate-like extruded material. Sputter targets were manufactured by rolling the extruded plate, and sputter characteristics were evaluated and found to be identical to those of commercial sputter targets used in the display industry. |
| Proceedings Inclusion? |
Planned: Light Metals |
| Keywords |
Aluminum, Electronic Materials, |