Abstract Scope |
Phosphorous (P) is a doping element of silicon to get n-type conductivity, where P-doped silicon is used important in optoelectronic industries. So studying the thermodynamic properties of Si-P system is interesting for silicon solar cell industry, and other silicon based technologies. In this work thermodynamic properties of Si-P binary system were determined using Thermo-Calc software at a pressure of 1 bar. Activity, Gibbs free energy, enthalpy, and entropy were plotted against temperature and/or composition and discussed on the light of the phase diagram. |