About this Abstract |
Meeting |
2025 TMS Annual Meeting & Exhibition
|
Symposium
|
Thin Films and Coatings: Properties, Processing and Applications
|
Presentation Title |
Thermal Measurements at the Nano-Scale: Theory, Reality, and Examples |
Author(s) |
Ron Fisher, John Gaskins |
On-Site Speaker (Planned) |
John Gaskins |
Abstract Scope |
Here we present the fundamentals of Steady-State Thermoreflectance measurements and several applications that demonstrate its usefulness in understanding the thermal behavior of material systems at device relevant length-scales. We will demonstrate material systems where the thickness of the material causes a reduction in thermal conductivity from expected bulk values, use of SSTR to measure the in-plane thermal conductivity of thin conductive films, ultra-thin films of single digit nanometers and how to extract thermal properties. Traditional thermoreflectance techniques have been used over the past couple decades, however they suffer from shallow probing depths. Additionally, these techniques measure thermal effusivity, a quantity that is related to both the thermal conductivity and the volumetric heat capacity, requiring knowledge of either, to calculate the other. SSTR has emerged as a new technique that offers increased depth sensitivity and also provides a direct measurement of thermal conductivity. |
Proceedings Inclusion? |
Planned: |
Keywords |
Characterization, Thin Films and Interfaces, Other |