| About this Abstract |
| Meeting |
MS&T24: Materials Science & Technology
|
| Symposium
|
Nanotechnology for Energy, Environment, Electronics, Healthcare and Industry
|
| Presentation Title |
Design and Development of Compact ZnO/SnO2 Nanocomposite, ZnO and In2O3 Thin Film Metal Oxide Sensors for Methane Detection. |
| Author(s) |
Lalitha Manaswini Dabilpuram, Shweta Meshram, Aroba Saleem |
| On-Site Speaker (Planned) |
Lalitha Manaswini Dabilpuram |
| Abstract Scope |
Methane detection is critical due to its environmental impact and role in safety monitoring in various industrial applications. Existing sensors, including electrochemical, and catalytic bead types, have limitations in sensitivity and operational stability. Sensors made from metal oxides offer numerous advantages such as great stability, affordability, production flexibility, high sensitivity, compactness, and broad applicability. This study focuses on the application of nanostructured metal oxide semiconductor (MOS) technology, using ZnO, In2O3, and ZnO/SnO2 nanocomposites, to enhance methane detection. A compact, low-power MOS chip sensor incorporating a five-layer design with an integrated microheater is developed. The sensors were microfabricated through techniques such as photolithography and magnetron sputtering. Calibration involved exposing the chips to various methane concentrations, and performance was also analyzed through comparative studies of XRD patterns and SEM-EDS mappings. Electrical characterization included determining temperature coefficient of resistance of the integrated microheater and conducting I-V analysis at different temperatures and methane concentrations. |