| About this Abstract |
| Meeting |
2025 TMS Annual Meeting & Exhibition
|
| Symposium
|
Functional Nanomaterials
|
| Presentation Title |
Controlling Structural and Electrical Properties of ZnO Nanowires Derived from Self-Assembled Block Copolymers and Vapor-Phase Infiltration |
| Author(s) |
Chang-Yong Nam |
| On-Site Speaker (Planned) |
Chang-Yong Nam |
| Abstract Scope |
Block copolymers (BCP) self-assembly leads to the formation of a wide variety of ordered nanostructures and can be combined with state-of-the-art top-down patterning technologies such as EUV lithography for advanced semiconductor patterning. Nevertheless, converting these organic nanopatterns into functional inorganic structures remains complex. In this talk, I will showcase our recent efforts on combining BCP self-assembly with vapor-phase infiltration (VPI), an organic-inorganic hybridization method derived from atomic layer deposition (ALD), to generate and control structural and electrical properties of semiconductor nanostructures. A particular example to be discussed is ZnO nanowires in which Al-doping during VPI enables facile control of their structural fidelity and electrical properties. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Electronic Materials, Thin Films and Interfaces, Polymers |