| About this Abstract |
| Meeting |
2025 TMS Annual Meeting & Exhibition
|
| Symposium
|
Functional Nanomaterials
|
| Presentation Title |
Vapor-Phase Infiltration (VPI) for Advanced Patterning, Device, and Microelectronics Applications |
| Author(s) |
Chang-Yong Nam |
| On-Site Speaker (Planned) |
Chang-Yong Nam |
| Abstract Scope |
Vapor-phase infiltration (VPI) is a hybridization technique derived from atomic layer deposition (ALD). It involves the cyclic infiltration of gaseous organometallic precursors and co-reactants into organic templates, forming organic-inorganic hybrids with tailored properties and structures. When applied to nanostructured polymeric templates—such as top-down patterned photoresists and self-assembled block copolymer (BCP) films—VPI enables unique hybrid materials and the fabrication of low-dimensional nanostructures. In this talk, I will provide an overview of VPI and highlight our work on metal oxide VPI for advanced patterning, device fabrication, and microelectronics. Key applications include hybrid nanopillars with exceptional elastic mechanical storage, metal oxide nanowire arrays and meshes for ultrahigh-sensitivity optical detection and sensing, and—if time permits—hybrid thin films for next-generation extreme ultraviolet (EUV) lithography. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Electronic Materials, Thin Films and Interfaces, Polymers |