| About this Abstract |
| Meeting |
2021 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advanced Real Time Imaging
|
| Presentation Title |
The Accurate Measurement of Elastic Modulus and Hardness of Different Cross-linked SU-8 Polymer |
| Author(s) |
Prakash Sarkar, Prita Pant, Hemant Nanavati |
| On-Site Speaker (Planned) |
Prakash Sarkar |
| Abstract Scope |
SU-8 is an epoxy-based resist involved to design ultra-thick and high aspect ratio micro-electrical mechanical system (MEM)-type applications require accurate values of mechanical properties. Hence, we show interest to measure elastic modulus (Er) and hardness (H) of different cross-linked SU-8 thin film fabricated by standard photolithography process. The cross-linking amount is estimated by in-situ Fourier-transform infrared spectroscopy (FTIR). To measure Er and H, nanoindentation experiments are performed at 800μN load. By following conventional method, obtained Er and H values are high for less cross-linked samples and vice-versa. This is because of adhesion between tip-sample surface, viscoelasticity and wrong contact area (Ac) measurement. After minimizing adhesion and viscoelasticity, residual area of indent impression obtained from scanning probe microscopy (SPM) is considered as Ac. Thereafter, we have obtained accurate values of Er that is 4.61±0.13GPa and 5.02±0.18GPa, and H is 256.97±1.42MPa and 285.48±1.17MPa for less (~82%) and high (~95%) cross-linked samples respectively. |
| Proceedings Inclusion? |
Planned: |