| About this Abstract |
| Meeting |
2024 TMS Annual Meeting & Exhibition
|
| Symposium
|
Nanostructured Materials in Extreme Environments II
|
| Presentation Title |
Mechanical Characterization of Thin Films via High-throughput Membrane Deflection Experiments |
| Author(s) |
Hojang Kim, Jae-Hoon Choi, Zhuo Feng Lee, Gi-Dong Sim |
| On-Site Speaker (Planned) |
Gi-Dong Sim |
| Abstract Scope |
In this presentation, I will introduce experimental studies utilizing micro/nano-scale manufacturing and mechanical characterization techniques to understand the mechanical behavior of small-scale materials. Specifically, our recent development of a constant strain rate membrane deflection experiment (MDE) technique that enables high-throughput measurement of in-plane mechanical properties of metal thin films will be introduced. The mechanical behavior of freestanding metal thin films (gold, aluminum, and nickel-molybdenum-tungsten alloy) is characterized using micro-tensile testing and MDE. Micro-tensile and membrane samples are simultaneously fabricated on a single wafer to avoid microstructural differences. By comparing with micro-tensile tests, it is demonstrated that the stress-strain curve of freestanding metal thin films can be successfully measured via constant strain rate MDE. I will also demonstrate that this technique can be utilized for accelerated exploration of the chemical composition effect on the mechanical behavior of advanced structural materials such as shape memory alloys. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Mechanical Properties, Thin Films and Interfaces, Characterization |