About this Abstract |
Meeting |
MS&T24: Materials Science & Technology
|
Symposium
|
Controlled Synthesis, Processing, and Applications of Structural and Functional Nanomaterials
|
Presentation Title |
Electrophoretic Deposition of Iron Oxide Nanoparticles in Various Planar Geometries for On-Chip Component Fabrication |
Author(s) |
Sara C. Mills, Connor S. Smith |
On-Site Speaker (Planned) |
Sara C. Mills |
Abstract Scope |
The miniaturization of on-chip components has become paramount as devices decrease in size and operating frequencies increase. Many of these components are comprised of magnetic materials, which must be incorporated in a semiconductor compatible process with fine control over deposition area. Electrophoretic deposition (EPD), a process where charged particles are deposited onto a conductive substrate under an applied dc electric field, can deposit micron-thick films of magnetic nanoparticles into feature sizes around 1 µm. This work shows develops EPD to deposit iron oxide nanoparticles into molds of various sizes and geometries patterned with photoresist on PCB substrates. Due to a difference between the dielectric constant of the photoresist and EPD suspension, the nanoparticles consolidated on the exposed regions of the substrate in molds. This work serves as the initial step for fabricating 0-3 nanocomposites as on-chip components, such as metaconductors consisting of iron oxide nanoparticles in a magnetic metal matrix. |