| About this Abstract |
| Meeting |
MS&T24: Materials Science & Technology
|
| Symposium
|
Advances in Emerging Electronic Nanomaterials: Towards Next-Generation Microelectronics
|
| Presentation Title |
One-Step Micropatterning of Laser-Induced Graphene Structures at Different Layers Simultaneously Towards 3D Microelectronics |
| Author(s) |
Soumalya Ghosh, Mirza Sahaluddin, Mostafa Bedewy |
| On-Site Speaker (Planned) |
Soumalya Ghosh |
| Abstract Scope |
We show a new approach for controlling the spatial distribution of laser-induced graphene (LIG) formation by tuning both the optical properties of a modified photoresist and the thermal properties of the underlying multilayer substrate. Using a pulsed near-infrared laser, we fabricate different configurations of 3D LIG microelectrode on an oxide-coated silicon wafer with black SU-8. Notably, we control the formation of these conductive porous graphene patterns on either only the top surface of SU8 only, the bottom surface (at the interface with the substrate), or on both simultaneously. This is achieved by controlling process dynamics using laser scan speed. Our results indicate that lower speeds favor the formation of LIG on the top surface, while higher speeds favor bottom-surface carbonization. This unprecedented capability of direct-write of readily insulated electrodes tunability in the location of carbon formation within LIG structures presents new opportunities for microelectronics, sensors and microfluidics within 3D architectures. |