| About this Abstract |
| Meeting |
2025 TMS Annual Meeting & Exhibition
|
| Symposium
|
Thin Films and Coatings: Properties, Processing and Applications
|
| Presentation Title |
Systematic Control of Crystallization Temperature of Amorphous NiTi Films using Seed Crystals |
| Author(s) |
Amirhossein Shafieizad, Paul Rasmussen, Jagannathan Rajagopalan |
| On-Site Speaker (Planned) |
Amirhossein Shafieizad |
| Abstract Scope |
NiTi films are widely used as sensors and actuators in micro-electro-mechanical systems (MEMS) due to their shape memory and pseudoelastic behavior. In these applications, it is important to limit the deposition/annealing temperature of the NiTi films to ensure compatibility with the overall MEMS fabrication process. Here, we introduce a method to systematically control the crystallization temperature of amorphous NiTi films by embedding appropriate seed crystals during the deposition process. We show that there is a strong correlation between the lattice matching of the seed crystal with the nucleating NiTi phase (Austenite) and the reduction in crystallization temperature. In certain cases (e.g., Cr seed crystals), the reduction in crystallization temperature can exceed 75 K. Furthermore, we show that the martensitic transformation temperatures of the NiTi films can also be changed by embedding different seed crystals, thereby enabling us to tune the properties of the NiTi films for various applications. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Thin Films and Interfaces, |