| Abstract Scope |
Understanding how to control adhesion, friction and fracture is critical to the success of micro- and nanotechnologies. In devices such as microswitches, nanoswitches and MEMS actuators, adhesion is undesirable. Low values, one microJoule per square meter can be achieved, as limited by van der Waals forces. Understanding the role of humidity, temperature and adventitious hydrocarbons is key. We construct advanced chambers in which each factor is controlled and measure the deflections of microfabricated test devices with nanometer-scale resolution to determine adhesion values. In other instances, high adhesion is critical. We observe that a few seconds of electrodeposition can be responsible for delamination of a 1.5 micrometer thick underlying film. I will discuss the underlying hydrogen injection mechanism and how to achieve high adhesion when current efficiency is low. |