| About this Abstract |
| Meeting |
2022 TMS Annual Meeting & Exhibition
|
| Symposium
|
Advanced Functional and Structural Thin Films and Coatings
|
| Presentation Title |
(CrMoTaVNb)Si2: A Novel Single-phase High Entropy Silicide Material |
| Author(s) |
Aleksandra L. Vyatskikh, Benjamin E. MacDonald, Leonardo Velasco, Alexander D. Dupuy, Enrique J. Lavernia, Julie M. Schoenung, Horst Hahn |
| On-Site Speaker (Planned) |
Benjamin E. MacDonald |
| Abstract Scope |
High entropy materials enable discovery of alloys and ceramics with novel functional and mechanical properties. Recently, high entropy silicides (HES) have been reported. HES are particularly intriguing due to their potential applications in microelectronics, where silicide materials are common. In this work, we identified two potential single-phase HES using the CALculation of PHAse Diagrams (CALPHAD) approach: the ternary (CrMoTa)Si2 and the quinary (CrMoTaVNb)Si2. We proceeded to synthesize both compositions experimentally via electron beam evaporation or magnetron sputtering. Deposition was followed by heat treatment in vacuum, which facilitated the solid-state reactions to form the desired compositions. With grazing incidence X-ray diffraction and energy-dispersive spectroscopy, we demonstrated that both the ternary (CrMoTa)Si2 and the quinary (CrMoTaVNb)Si2 HES formed a single phase with a C40 hexagonal crystal structure. Our experimental findings validated the initial CALPHAD phase formation predictions. Overall, our study reports the first experimental realization of a thin-film high entropy silicide material. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Ceramics, Thin Films and Interfaces, Electronic Materials |