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Meeting 2023 TMS Annual Meeting & Exhibition
Symposium Late News Poster Session
Presentation Title D-37: Development of Xe Gas Recycling System
Author(s) Chang-Hoon Kwak, Ro Youngju, Hong Eun Sun, Shin Hye Sun, Kim Jun Woo
On-Site Speaker (Planned) Chang-Hoon Kwak
Abstract Scope Due to the increased demand and limited supply of Xe gas caused by aerospace technology development and the risk of global economic crisis, the price of Xe required for the semiconductor production is constantly rising. In order to provide stable supply of Xe gas, we are planning to develop a Xe recycling technology that can adsorb, separate, and purify Xe gas discharged from the semiconductor production process. Therefore, it is crucial to develop a porous adsorbent that can selectively adsorb Xe gas from various gases discharged after semiconductor production. In this study, four types of zeolites and two types of metal organic frameworks are selected as Xe adsorbent candidates, and their Xe adsorption efficiency is evaluated through adsorption breakthrough tests. We are aiming to develop a recycling system that can purify and collect Xe gas emitted from the workplace through the surface adsorption study of zeolites and metal organic frameworks.
Proceedings Inclusion? Undecided

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