| About this Abstract |
| Meeting |
MS&T24: Materials Science & Technology
|
| Symposium
|
Advances in Emerging Electronic Nanomaterials: Towards Next-Generation Microelectronics
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| Presentation Title |
Nanomolecularly-Induced Kinetic, Chemical, and Morphological Effects during Synthesis of Hybrid Inorganic/Organic Nanolaminates for Emergent Properties |
| Author(s) |
Collin Rowe, Ankit Kashyap, Mahima Sasikumar, Geetu Sharma, Johan Alauzun, Ajay Soni, Per Eklund, Henrik Pedersen, Ganpati Ramanath |
| On-Site Speaker (Planned) |
Collin Rowe |
| Abstract Scope |
Organic molecular nanolayers (MNLs) at inorganic thin film interfaces are known to stimulate unusual mechanical and electrical/thermal transport behaviors. Stacking MNL-tailored interfaces into nanolaminates offers access to emergent properties via superposition effects from multiple MNL interfaces. Synthesizing such nanolaminates requires low-temperature depositions of continuous ultrathin inorganic nanolayers on MNLs, without destroying the MNLs. Here, we demonstrate the synthesis of inorganic/MNL multilayers with sharp interfaces by atomic-/molecular-layer deposition (ALD/MLD) for titanium/aluminum oxides/nitrides, and different MNL chemistries. We find that MNLs significantly alter the inorganic nanolayer growth rate, composition, surface roughness, and phase stability. Examples include organodiphosphonate-MNL-induced ~50% titania growth rate reduction and suppressed crystallization, and hydroquinone-MNL-induced aluminum nitride-to-oxide conversion. Atomistic mechanisms of the MNL-induced effects will be discussed in terms of the impact of the MNL structure and terminal chemistry on surface reactions. Our findings are germane to enabling the discovery and design of hybrid nanolaminates with novel properties. |