| About this Abstract |
| Meeting |
2025 TMS Annual Meeting & Exhibition
|
| Symposium
|
Nano and Micro Additive Manufacturing
|
| Presentation Title |
Nanoscale Focused Electron and Ion Beam Induced Processing: Extending 3d Printing to the Nanoscale |
| Author(s) |
Philip D. Rack |
| On-Site Speaker (Planned) |
Philip D. Rack |
| Abstract Scope |
Focused electron beam induced processing has been used for decades as a means to direct write and etch pseudo-2-diminsional (2D) features. As additive manufacturing for low-volume manufacturing has burgeoned in the past decade, the push towards nanoscale 3d synthesis was inevitable. In this talk we will overview the electron-solid-gas interactions that are critical to nanoscale directed synthesis via focused electron beams. We will then overview our teams recent work in extending focused electron beam induced deposition to 3D. Appropriate control of the electron beam raster sequence provides a means to “lift” deposition off the substrate and thus the ability to print complex three dimensional structures. We will demonstrate our recent experimental and simulation results and introduce a computer aided design program that can turn an electron microscope into a 3d nanoscale printer. Finally, present some recent nanoscale 3d applications and hierarchical synthesis processes for functionalizing the 3D features. |
| Proceedings Inclusion? |
Planned: |
| Keywords |
Additive Manufacturing, Nanotechnology, Modeling and Simulation |