| Abstract Scope |
It is imperative that the future of integrated nano and micro systems relies on the fundamental understanding of manufacturing structures, related processes and measurements across the scale, signal and domain boundaries. The presentation will demonstrate roles of nano materials, micro and nano processing tools, nano manufacturing processes and system durability related to successful realization of integrated systems. A discussion will be presented on the fundamental and applied science done on nanocarbon materials (nanocrystalline diamond and graphene) and microfabrication processes and characterization of mechanical, tribological, electronic transport, and bio-compatible properties. The unique properties of this nanocrystalline diamond (NCD) can make it a promising candidate for use as protective coating of machining tools, a hermetic, corrosion-resistant coating for biodevices, a cold-cathode electron sources, and structural materials in micro-and nanoelectromechanical systems (MEMS/NEMS). |